Advanced Etching & Stripping for CMOS

Plasma etching and stripping for FEOL (STI, Finfet, spacer, metal gate,...)
Plasma etching and stripping for MEOL (contact, self aligned contact)
Plasma etching and stripping for BEOL application (ULK trenches and vias)


Etching and Stripping for more than Moore applications

Plasma etching and stripping for MEMS, bio MEMS, imagers, photonics
Plasma etching and stripping for 3D IC


New Processes/New materials

Patterning with alternative lithography (di-block copolymer, EUV resist…)
Plasma etching and stripping for III-V materials (HEMT, CMOS, ...)
Plasma etching and stripping for memories (MRAM, OXRAM, PCRAM, CBRAM...)
New etch concept (Atomic Layer Etching, Self-limiting etching)
Plasma for alternative technologies (biotechnology, PV….)


Plasma fundamentals

New Plasma Sources
Advanced plasma diagnostics
Plasma surface interactions
Plasma Modeling